Glass Quartz Mask

Description:

Through the ultra-precision flat grinding and polishing, the quartz glass substrate becomes an important mask material in the manufacturing process of semiconductor yellow light.

Application:

In various technology industries such as semiconductor logic integrated circuit, memory, LED, panels and PCB, due to the miniaturization of circuits, mask blank is widely used in the quartz glass and the soda glass. It is sputtered by Cr and MoSi2 to form a thin film, and It is coated with photosensitive materials. Finally It becomes a product.




Process Capability
  glass blank quartz blank
Depth(mm) 0.1~20 0.1~20
Size(mm) 1~1400 1~1400
TTV(um) <5 <5
Surface roughness(Ra) Min 0.01um Min 0.01um