Etching machine / Exposure System
Application:
Theelectrode on the etching machine needs to have the characteristics of corrosion resistance and impact resistance on plasma, so silicon, quartz and ceramic materials are often used.
Si shower head : 0.45*10.5t*8inch
E-CHUCK Ceramics/Silicon
The ceramic plate of E-CHUCK has ultra precision flatness and polishing value.
Process Capability
| Si/Quartz shower head | E-CHUCK Ceramics/Silicon | |
| Depth(mm) | 0.1~20 | 0.1~20 |
| Aperture(mm) | Min 0.15mm | Min 0.15mm |
| Size(mm) | 1~500 | 1~500 |
| TTV(um) | <1 | <1 |
| Surface roughness(Ra) | Min 0.01um | Min 0.01um |